Monitor and control process output for quality devices
Metrology is an irreplaceable process that allows us to monitor the outcomes of critical steps during the production and keep the production yield to consistently meet customer specifications. Especially when customer designs shrink in size and certain specifications become tighter, the process control and metrology will become more demanding. The measurement data not only plays an important role in process control but also shows us a clue to further improve the production output.
Sensera measures electrical properties, film properties, and Critical Dimension (CD) during the production. Specifically, Sensera provides:
- Automated Probing
- CD Microscopes, SEM
- Surface Profiler
- Film Stress Measurements
- Sheet resistance, TLM measurements